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Characteristics of SiH4/H2 VHF plasma produced by short gap discharge

✍ Scribed by Tatsuyuki Nishimiya; Tsukasa Yamane; Sachiko Nakao; Yoshiaki Takeuchi; Yasuhiro Yamauchi; Hiromu Takatsuka; Hiroshi Muta; Kiichiro Uchino; Yoshinobu Kawai

Book ID: 113919405
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 399 KB
Volume: 205
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.02.043

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