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Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS

✍ Scribed by Yan Xin Zhuang; Hansen, O.; Knieling, T.; Wang, C.; Rombach, P.; Lang, W.; Benecke, W.; Kehlenbeck, M.; Koblitz, J.

No coin nor oath required. For personal study only.

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