✦ LIBER ✦
Investigation of anti-stiction coating for ohmic contact MEMS switches with thiophenol and 2-naphthalenethiol self-assembled monolayer
✍ Scribed by Takahiro Yamashita; Toshihiro Itoh; Tadatomo Suga
- Book ID
- 113905092
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 953 KB
- Volume
- 172
- Category
- Article
- ISSN
- 0924-4247
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