AFM study of perfluoroalkylsilane and alkylsilane self-assembled monolayers for anti-stiction in MEMS/NEMS

✍ Scribed by Bharat Bhushan; Toshi Kasai; Gerit Kulik; Laura Barbieri; Patrik Hoffmann

• Book ID: 108291648
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 445 KB
• Volume: 105
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/j.ultramic.2005.06.034