Vapor-Phase Self-Assembled Monolayer for Improved Mold Release in Nanoimprint Lithography

✍ Scribed by Jung, Gun-Young; Li, Zhiyong; Wu, Wei; Chen, Yong; Olynick, Deirdre L.; Wang, Shih-Yuan; Tong, William M.; Williams, R. Stanley

• Book ID: 111921767
• Publisher: American Chemical Society
• Year: 2005
• Tongue: English
• Weight: 334 KB
• Volume: 21
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la0476938