Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

✍ Scribed by Ashurst, W.R.; Yau, C.; Carraro, C.; Maboudian, R.; Dugger, M.T.

• Book ID: 111916198
• Publisher: IEEE
• Year: 2001
• Tongue: English
• Weight: 479 KB
• Volume: 10
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/84.911090