✦ LIBER ✦

Validity of the thin mask approximation in extreme ultraviolet mask roughness simulations

✍ Scribed by Naulleau, Patrick P. ;George, Simi A.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of mask-roughness on printed cont

✍ Naulleau, Patrick P. 📂 Article 📅 2005 🏛 The Optical Society 🌐 English ⚖ 491 KB

Correlation method for the measure of ma

✍ Naulleau, Patrick P. 📂 Article 📅 2009 🏛 The Optical Society 🌐 English ⚖ 904 KB

Relevance of mask-roughness-induced prin

✍ Naulleau, Patrick P. 📂 Article 📅 2004 🏛 The Optical Society 🌐 English ⚖ 689 KB

Progress in the fabrication of low-defec

✍ Ma, Andy 📂 Article 📅 2006 🏛 The International Society for Optical Engineering 🌐 English ⚖ 837 KB