✦ LIBER ✦

Progress in the fabrication of low-defect density mask blanks for extreme ultraviolet lithography

✍ Scribed by Ma, Andy

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reduction of defect density on blanks: a

✍ J. Hue; E. Quesnel; V. Muffato; C. Pellé; D. Granier; S. Favier; P. Besson 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 549 KB

At-wavelength inspection of sub-40 nm de

✍ Lin, Jingquan; Weber, Nils; Maul, Jochen; Hendel, Stefan; Rott, Karsten; Merkel, 📂 Article 📅 2007 🏛 Optical Society of America 🌐 English ⚖ 275 KB

Correlation method for the measure of ma

✍ Naulleau, Patrick P. 📂 Article 📅 2009 🏛 The Optical Society 🌐 English ⚖ 904 KB