✦ LIBER ✦

Effect of mask-roughness on printed contact-size variation in extreme-ultraviolet lithography

✍ Scribed by Naulleau, Patrick P.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Relevance of mask-roughness-induced prin

✍ Naulleau, Patrick P. 📂 Article 📅 2004 🏛 The Optical Society 🌐 English ⚖ 689 KB

Correlation method for the measure of ma

✍ Naulleau, Patrick P. 📂 Article 📅 2009 🏛 The Optical Society 🌐 English ⚖ 904 KB

Effect of focal spot size on in-band 13.

✍ Tao, Y.; Harilal, S. S.; Tillack, M. S.; Sequoia, K. L.; O'Shay, B.; Najmabadi, 📂 Article 📅 2006 🏛 Optical Society of America 🌐 English ⚖ 279 KB

High-porosity permeable materials from m

✍ A. G. Kostornov; A. L. Moroz; I. M. Fedorchenko 📂 Article 📅 1980 🏛 Springer 🌐 English ⚖ 376 KB