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Use of a neural network to characterize the charge density of PECVD-silicon nitride films

✍ Scribed by Byungwhan Kim; Sang Hee Kwon

Book ID: 105696911
Publisher: TechnoPress
Year: 2007
Tongue: English
Weight: 274 KB
Volume: 13
Category: Article
ISSN: 1598-9623
DOI: 10.1007/bf03027909

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