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Unintentional incorporation of contaminants during chemical vapour deposition of silicon carbide

✍ Scribed by Stephan Karmann; Léa Di Cioccio; Bruno Blanchard; Thierry Ouisse; Denise Muyard; Claude Jaussaud


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
354 KB
Volume
29
Category
Article
ISSN
0921-5107

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