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Morphology of silicon carbide formed by chemical vapour deposition

✍ Scribed by R. Pampuch; L. Stobierski


Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
165 KB
Volume
11
Category
Article
ISSN
0272-8842

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πŸ“œ SIMILAR VOLUMES


Preparation of hydrogenated amorphous si
✍ J Huran; J Ε afrΓ‘nkovΓ‘; A.P. Kobzev πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 252 KB

Thin silicon carbide (SiCI films were prepared by plasma enhanced chemical vapour deposition PECVDI. The structural properties of Sic films were investigated by IR, RBS, and ERD measurement techniques. The results showed that the films contain the typical features found in hydrogenated amorphous Sic