✦ LIBER ✦

Uniformity of epilayer grown by ultrahigh-vacuum chemical vapor deposition

✍ Scribed by Ting-Chang Chang; Wen-Kuan Yeh; Chun-Yen Chang; Tz-Guei Jung; Wen-Chung Tsai; Guo-Wei Huang; Yu-Jane Mei

Book ID: 113300607
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 398 KB
Volume: 44
Category: Article
ISSN: 0254-0584
DOI: 10.1016/0254-0584(95)01645-b

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