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Thin strain-relaxed SiGe grown by ultrahigh vacuum chemical vapor deposition

✍ Scribed by Xiangdong Xu; Hockleong Kweh; Zhengcao Zhang; Zhihong Liu; Wei Zhou; Wei Zhang; Peixin Qian

Book ID: 103818398
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 404 KB
Volume: 252
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.05.064

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