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Uniformity and Scalability of AlGaN/GaN HEMTs Using Stepper Lithography

✍ Scribed by Lossy, R. ;Hilsenbeck, J. ;W�rfl, J. ;Obloh, H.

Book ID: 101384065
Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 80 KB
Volume: 188
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200111)188:1<263::aid-pssa263>3.0.co;2-p

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