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Substrate removal of AlGaN/GaN HEMTs using laser lift-off

✍ Scribed by J. Das; W. Ruythooren; R. Vandersmissen; J. Derluyn; M. Germain; G. Borghs

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 129 KB
Volume: 2
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200461355

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