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Ultrathin silicon oxide films deposited by synchrotron irradiation of condensed layers of silanes and water

✍ Scribed by J.F. Moore; D.R. Strongin

Book ID: 107864849
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 803 KB
Volume: 280
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)08177-1

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