✦ LIBER ✦
Size Dependent Effects in Nucleation of Ru and Ru Oxide Thin Films by Atomic Layer Deposition Measured by Synchrotron Radiation X-ray Diffraction
✍ Scribed by Methaapanon, Rungthiwa; Geyer, Scott M.; Brennan, Sean; Bent, Stacey F.
- Book ID
- 126205015
- Publisher
- American Chemical Society
- Year
- 2013
- Tongue
- English
- Weight
- 594 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0897-4756
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