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Ultrasonically stimulated low-temperature redistribution of impurities in silicon

✍ Scribed by I. V. Ostrovskii; A. B. Nadtochii; A. A. Podolyan

Book ID: 110129929
Publisher: Springer
Year: 2002
Tongue: English
Weight: 49 KB
Volume: 36
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1469179

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