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Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon

✍ Scribed by A. V. Kulikov; V. A. Perevoshchikov; V. D. Skupov; V. G. Shengurov


Book ID
119979757
Publisher
SP MAIK Nauka/Interperiodica
Year
1997
Tongue
English
Weight
46 KB
Volume
23
Category
Article
ISSN
1063-7850

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