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Long-range gettering of microdefects in silicon single crystals during the formation of porous silicon layers on their surface and ion irradiation

✍ Scribed by V. A. Perevoshchikov; V. D. Skupov

Book ID: 110123947
Publisher: SP MAIK Nauka/Interperiodica
Year: 1999
Tongue: English
Weight: 71 KB
Volume: 25
Category: Article
ISSN: 1063-7850
DOI: 10.1134/1.1262464

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