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Plasma Stimulated Impurity Redistribution in Silicon

✍ Scribed by Koveshnikov, S. V. ;Yakimov, E. B. ;Yarykin, N. A. ;Yunkin, V. A.

Book ID: 105380966
Publisher: John Wiley and Sons
Year: 1989
Tongue: English
Weight: 426 KB
Volume: 111
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211110108

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