Ultra-thin Chip Technology and Applicati
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Burghartz, Joachim
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Article
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2010
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Springer New York
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English
β 294 KB
Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technolo