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X-ray studies of ultra-thin Si wafers for mirror application

โœ Scribed by J. Sass; K. Mazur; B. Surma; F. Eichhorn; D. Litwin; J. Galas; S. Sitarek

Book ID
103861539
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
439 KB
Volume
253
Category
Article
ISSN
0168-583X

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Application of conic section geometries play an important role for soft X-ray synchrotron beams. Mirror design for collimation or focusing under stringent boundary conditions may end up with very aspheric geometries. In particular, the aspheric departure of these surfaces from ''base geometries'' in