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Thickness determination of metal thin films with spectroscopic ellipsometry for x-ray mirror and multilayer applications

✍ Scribed by Liu, Chian; Erdmann, J.; Maj, J.; Macrander, A.

Book ID: 121270414
Publisher: AVS (American Vacuum Society)
Year: 1999
Tongue: English
Weight: 476 KB
Volume: 17
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.581939

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