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A New Versatile Instrument for Characterization of Thin Films and Multilayers Using Spectroscopic Ellipsometry and Grazing X-Ray Reflectance

✍ Scribed by Boher, P. ;Stehle, J.L.


Publisher
John Wiley and Sons
Year
1998
Tongue
English
Weight
396 KB
Volume
170
Category
Article
ISSN
0031-8965

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