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Studies of density and surface roughness of ultrathin amorphous carbon films with regards to thickness with x-ray reflectometry and spectroscopic ellipsometry

โœ Scribed by Logothetidis, S.; Stergioudis, G.


Book ID
121308445
Publisher
American Institute of Physics
Year
1997
Tongue
English
Weight
309 KB
Volume
71
Category
Article
ISSN
0003-6951

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