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An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films

✍ Scribed by S. Ladas; L. Sygellou; S. Kennou; M. Wolf; G. Roeder; A. Nutsch; M. Rambach; W. Lerch


Book ID
113937000
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
446 KB
Volume
520
Category
Article
ISSN
0040-6090

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