Ultra-thin Chip Technology and Applications || Ultra-thin Wafer Fabrication Through Dicing-by-Thinning
โ Scribed by Burghartz, Joachim
- Book ID
- 121424739
- Publisher
- Springer New York
- Year
- 2010
- Tongue
- English
- Weight
- 294 KB
- Edition
- 2011
- Category
- Article
- ISBN
- 1441972765
No coin nor oath required. For personal study only.
โฆ Synopsis
Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
๐ SIMILAR VOLUMES
Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technolo
This paper describes ultra-thin high-quality silicon oxide (SiO 2 ) films deposited at low temperature by sputtering from a SiO 2 target in an oxygen^argon mixture. SiO 2 films up to a thickness of 6.5 nm are successfully formed on polycrystalline silicon (poly-Si) films which have a surface roughne