๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Ultra-thin Chip Technology and Applications || Ultra-thin Wafer Fabrication Through Dicing-by-Thinning

โœ Scribed by Burghartz, Joachim


Book ID
121424739
Publisher
Springer New York
Year
2010
Tongue
English
Weight
294 KB
Edition
2011
Category
Article
ISBN
1441972765

No coin nor oath required. For personal study only.

โœฆ Synopsis


Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.


๐Ÿ“œ SIMILAR VOLUMES


Ultra-thin Chip Technology and Applicati
โœ Burghartz, Joachim ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Springer New York ๐ŸŒ English โš– 522 KB

Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technolo

Ultra-thin silicon-oxide films by sputte
โœ T Serikawa; S Shirai ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 448 KB

This paper describes ultra-thin high-quality silicon oxide (SiO 2 ) films deposited at low temperature by sputtering from a SiO 2 target in an oxygen^argon mixture. SiO 2 films up to a thickness of 6.5 nm are successfully formed on polycrystalline silicon (poly-Si) films which have a surface roughne