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Ultra-high-resolution negative e-beam resist: AlF3

✍ Scribed by H.R. Borsje; H.M. Jaeger; S. Radelaar

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 311 KB
Volume: 17
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90064-x

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