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A General Approach to Semimetallic, Ultra-High-Resolution, Electron-Beam Resists

✍ Scribed by Bao-Yu Zong; Gu-Chang Han; Yuan-Kai Zheng; Li-Hua An; Tie Liu; Ke-Bin Li; Jin-Jun Qiu; Zai-Bing Guo; Ping Luo; Hao-Min Wang; Bo Liu

Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Weight: 464 KB
Volume: 19
Category: Article
ISSN: 1616-301X
DOI: 10.1002/adfm.200800939

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