✦ LIBER ✦
Surface imaging with HMCTS on SAL-resists, a dry developable electron beam process with high sensitivity and good resolution
✍ Scribed by Thomas Kerber; Hans.W.P. Koops
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 303 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
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