✦ LIBER ✦

New high resolution and high sensitivity deep UV, x-ray, and electron beam resists

✍ Scribed by Michael Hatzakis; Kevin J. Stewart; Jane M. Shaw; Stephen A. Rishton

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 208 KB
Volume: 11
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(90)90156-n

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