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Two-dimensional simulation of inductive plasma sources with self-consistent power deposition

✍ Scribed by Ming Li; Han-Ming Wu; Yunming Chen

Book ID: 117862637
Publisher: IEEE
Year: 1995
Tongue: English
Weight: 420 KB
Volume: 23
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.467975

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