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Rapid two-dimensional self-consistent simulation of inductively coupled plasma and comparison with experimental data

✍ Scribed by Wise, Richard S.; Lymberopoulos, Dimitris P.; Economou, Demetre J.

Book ID: 121340849
Publisher: American Institute of Physics
Year: 1996
Tongue: English
Weight: 295 KB
Volume: 68
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.115834

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