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Two-dimensional simulation of inductively coupled plasma based on COMSOL and comparison with experimental data

✍ Scribed by Cheng, Jia; Ji, Linhong; Wang, Kesheng; Han, Chuankun; Shi, Yixiang

Book ID: 120550497
Publisher: IOP Publishing
Year: 2013
Tongue: English
Weight: 777 KB
Volume: 34
Category: Article
ISSN: 1674-4926
DOI: 10.1088/1674-4926/34/6/066004

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