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Two-Dimensional Fluid Simulation of Collisional Plasma Sheath over rf Powered Electrode with Cylindrical Hole

✍ Scribed by Lujing, Hou; Younian, Wang; Miskvic, Z L


Book ID
120302384
Publisher
IOP Publishing
Year
2004
Tongue
English
Weight
626 KB
Volume
6
Category
Article
ISSN
1009-0630

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