✦ LIBER ✦

Two-dimensional fluid model of high density inductively coupled plasma sources

✍ Scribed by Stewart, R. A.

Book ID: 121276693
Publisher: AVS (American Vacuum Society)
Year: 1994
Tongue: English
Weight: 826 KB
Volume: 12
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.587102

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