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Plasma uniformity in high-density inductively coupled plasma tools

✍ Scribed by Stewart, R A; Vitello, P; Graves, D B; Jaeger, E F; Berry, L A

Book ID: 118056649
Publisher: Institute of Physics
Year: 1995
Tongue: English
Weight: 853 KB
Volume: 4
Category: Article
ISSN: 0963-0252
DOI: 10.1088/0963-0252/4/1/005

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