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Ion density and temperature distributions in an inductively coupled high-plasma density reactor

✍ Scribed by Lymberopoulos, D.P.; Wise, R.S.; Economou, D.J.; Bartel, T.J.

Book ID: 117862742
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 130 KB
Volume: 24
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.491746

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