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Spectroscopic determination of electron density and temperature profiles in an inductively-coupled argon plasma

✍ Scribed by S. Nowak; J.A.M. van der Mullen; B. van der Sijde; D.C. Schram

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 535 KB
Volume: 41
Category: Article
ISSN: 0022-4073
DOI: 10.1016/0022-4073(89)90027-7

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