✦ LIBER ✦
In-Situ Method of Monitoring Argon Plasma Density Variation Using Current and Voltage of Flat Antenna in Inductively Coupled Plasma Source
✍ Scribed by S.-H. Lee; J.-H. Cho; G.-H. Kim
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 288 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0005-8025
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