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Model for noncollisional heating in inductively coupled plasma processing sources

✍ Scribed by Rauf, Shahid; Kushner, Mark J.

Book ID: 121343758
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 535 KB
Volume: 81
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.364385

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