2-D analytic model for inductively coupled plasma sources. II. Effects of 2-D coupled damping and their applications

✍ Scribed by Wu, C.-H.J.; Fa Dai

• Book ID: 117862441
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 863 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.376563