2-D analytic model for inductively coupled plasma sources. I. Electromagnetic model and kinetic analysis

✍ Scribed by Fa Dai; Wu, C.-H.J.

• Book ID: 117862440
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 853 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.376562