Fluid dynamic modelling and experimental diagnostics of an inductive high density plasma source (ICP)

✍ Scribed by P. Scheubert; P. Awakowicz; R. Schwefel; G. Wachutka

• Book ID: 108422865
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 300 KB
• Volume: 142-144
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01053-2