Turbostratic-like carbon nitride coatings deposited by industrial-scale direct current magnetron sputtering

✍ Scribed by Louring, S.; Madsen, N.D.; Berthelsen, A.N.; Christensen, B.H.; Almtoft, K.P.; Nielsen, L.P.; Bøttiger, J.

• Book ID: 120344175
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 983 KB
• Volume: 536
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.03.016