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Structural and mechanical properties of diamond-like carbon films deposited by direct current magnetron sputtering

✍ Scribed by Broitman, E.; Hellgren, N.; Czigány, Zs.; Twesten, R. D.; Luning, J.; Petrov, I.; Hultman, L.; Holloway, B. C.

Book ID: 126948912
Publisher: AVS (American Vacuum Society)
Year: 2003
Tongue: English
Weight: 754 KB
Volume: 21
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1575231

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