✦ LIBER ✦

Transport mechanism of deposition precursors in catalytic chemical vapor deposition studied using a reactor tube

✍ Scribed by Namiko Honda; Atsushi Masuda; Hideki Matsumura

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low-temperature deposition of diamond us

✍ Hong, Franklin Chau-Nan; Hsieh, Jing-Chuang; Wu, Jih-Jen; Liang, Gou-Tsau; Hwang 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 787 KB

Reaction mechanism of a lanthanum precur

✍ Toshihiro Nakamura; Takuro Nishimura; Ryusuke Tai; Kunihide Tachibana 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 347 KB

Kinetics of silicon epitaxy using SiH4 i

✍ Liehr, M.; Greenlief, C. M.; Kasi, S. R.; Offenberg, M. 📂 Article 📅 1990 🏛 American Institute of Physics 🌐 English ⚖ 627 KB

An analytical study of the Chemical Vapo

✍ K. Chen; A.R. Mortazavi 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 817 KB

Visualization and numerical simulation o

✍ Heru Setyawan; Manabu Shimada; Kenji Ohtsuka; Kikuo Okuyama 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 451 KB

Numerical modeling of silicon oxide part

✍ S.-M. Suh; M.R. Zachariah; S.L. Girshick 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 345 KB