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Transition from small interstitial clusters to extended {311} defects in ion-implanted Si

✍ Scribed by Coffa, Salvatore; Libertino, Sebania; Spinella, Corrado


Book ID
120080209
Publisher
American Institute of Physics
Year
2000
Tongue
English
Weight
493 KB
Volume
76
Category
Article
ISSN
0003-6951

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